-
Flow range
0.5SCCM～20SLPM -
Accuracy
±0.5~1.0%Rd -
Pressure
5kPaA~2MPaA -
Gas temperature
-50℃~110℃
Specifications
| Model | T100 | T300 | T450 | ||
| Flow range | 20SCCM～20SLPM | 0.5SCCM～20SLPM | 2SCCM～20SLPM | ||
| Accuracy | ±1.0%F.S. (2%～100% F.S.) | 1.0%Rd(20%～100%F.S.) 0.2%F.S.(0.5%～20%F.S.) | 0.5%Rd(20%～100%F.S.) 0.1%F.S.(0.5%～20%F.S.) | ||
| Repeatability | ±0.2%F.S. | 0.2%Rd(20%～100%F.S.) 0.04%F.S.(0.5%～20%F.S.) | 0.1%Rd(20%～100%F.S.) 0.02%F.S.(0.5%～20%F.S.) | ||
| Pressure shift | ≤±0.1%F.S./100kPa Benchmark 100kPaA | ≤±0.1%Rd/100kPa Benchmark 100kPaA | |||
| Temperature shift | ≤±0.05%F.S./℃ Benchmark 25℃ | ≤±0.02%F.S./℃ Benchmark 25℃ | |||
| Zero shift | ±0.2%F.S. | ±0.1%F.S. | |||
| Operating range | 2%～100%F.S. | 1%～100%F.S. | 0.5%～100%F.S. | ||
| Response time | ≤100ms | ||||
| Warm-up time | ≤1s | ||||
| Gas temperature | 0℃～50℃ | -20℃～60℃ | |||
| Ambient temperature | 0℃～50℃ | -20℃～50℃ | |||
Pressure drop | 10kPa（≤5SLPM）；6kPa（10SLPM）；8kPa（20SLPM） | ||||
| Proof pressure | 1.5 MPaA | ||||
Max pressure | 900kPaA | ||||
| Leak rate | ≤1×10-10 Pa·m³/s He | ||||
| Power supply voltage | 24V±20% | ||||
| Mounting orientation sensitivity | None | ||||
| Process connectors | G thread、VCR、Swagelok、IGS | ||||
| Wetted materials | SUS316L、FKM、FFKM、EPDM、Neoprene | ||||
| Sealing | Rubber ring seal：FKM、FFKM、EPDM、Neoprene | ||||
| Communication | RS485、4～20mA / 0～5V | ||||
Application scenarios
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