-
Flow range
0.5SCCM~5000SLPM -
Accuracy
±0.5~1.0%Rd -
Pressure
5kPaA~2MPaA -
Gas temperature
-20℃~60℃
Specifications
| Model | S100 | S200 |
| Flow range | 0.5SCCM～5000SLPM | 0.5SCCM～2000SLPM |
Accuracy | ±1.0%Rd(20%~100%F.S.） | ±0.5%Rd(20%~100%F.S.） ±0.1%F.S.(1%~20%F.S.） |
| Repeatability | ±0.2%F.S. | |
Pressure shift | Zero：≤±0.2%F.S./100KPa； Span：≤±0.2%F.S./100Kpa(Benchmark 100KPaA) | Zero：≤±0.05%F.S./100KPa； Span：≤±0.05%F.S./100Kpa(Benchmark 100KPaA) |
Temperature shift | Zero：≤±0.05%F.S./℃； Span：≤±0.05%F.S./℃（Benchmark 25℃） | Zero：≤±0.02%F.S./℃； Span：≤±0.02%F.S./℃（Benchmark 25℃） |
| Operating range | 1%～100%F.S. | |
| Response time | ≤100ms | |
| Warm-up time | ≤1s | |
| Gas temperature | -20℃～60℃ | |
| Pressure drop | 4kPa（≤5SLPM）; 8kPa（10~500SLPM）; 15kPa（1000~5000SLPM） | |
| Proof pressure | 1.5 MPaA | |
| Max pressure | 60kPaA~1MPaA | |
| Power supply voltage | 24VDC(±20%) | |
| Mounting orientation sensitivity | None | |
| Process connectors | G thread | |
| Wetted materials | SUS316L | |
| Sealing material | Rubber ring seal: FKM | |
| Communication | RS485, 0～5V, 4～20mA | |
Application scenarios
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University research institutes and laboratories
Gas measurement in environmental analysis
Analysis/Environmental Protection Equipment
Gas leakage detection system
>
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