Gas mass flow meter(MFM)

  • Flow range

    0.5SCCM~5000SLPM
  • Accuracy

    ±0.5~1.0%Rd
  • Pressure

    5kPaA~900kPa
  • Battery life

    Up to 15 hours
Gas mass flow meter(MFM)

Specifications

ModelP300
P400P450
Flow range0.5SCCM~5000SLPM2SCCM~2000SLPM2SCCM~2000SLPM

Accuracy

±1.0%Rd(20%~100%F.S.);
±0.2%F.S.(1%~20%F.S.)

±1.0%Rd(10%~100%F.S.);
±0.1%F.S.(0.5%~10%F.S.)

±0.5%Rd(20%~100%F.S.);
±0.1%F.S.(0.5%~20%F.S.)

Repeatability

±0.2%Rd(20%~100%F.S.);
 ±0.04%F.S.(0.5%~20%F.S.)

±0.1%Rd(20%~100%F.S.);
±0.02%F.S.(0.5%~20%F.S.)

Pressure shift

≤±0.1%Rd/100kPa(Benchmark 100kPaA)

Temperature shift

≤±0.02%F.S./℃(Benchmark 25℃)
Zero shift±0.1%F.S.
Operating range0.5%~100%F.S.
Response time
≤100ms

Warm-up time

≤1s
Gas temperature-20℃~60℃
Pressure drop

7kPa(≤20SLPM);9kPa(50~100SLPM);12kPa(200SLPM);
17kPa(500SLPM);20kPa( 1000SLPM);22kPa(1500~2500SLPM);35kPa(3000~5000SLPM)

Proof pressure1.5 MPaA
Max pressure900kPaA
Endurance time15 hours
Mounting orientation sensitivityNone
Process connectorsG thread
Wetted materialsSUS316L、FKM
SealingFKM
CommunicationRS485


Gas mass flow meter(MFM)

Application scenarios

Gas measurement/control in environmental analysis

Flow calibration comparison device

Analysis/Environmental Protection Equipment

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