YIDU MFC helps the vacuum industry achieve long-term stability in flow control
In vacuum coating equipment, the stability of MFC is directly related to the coating quality of the workpiece. The YIDU MFC adopts the principle of laminar differential pressure measurement, with zero drift during long-term operation, less pollution and blockage, precise and fast flow control, and can be applied to various gases such as silane, acetylene, hydrogen, argon, nitrogen, etc., which can improve the coating quality of various types of PVD and CVD equipment.
Low Temperature & Pressure shift Stable Long-Term Operation Multiple Communication Protocols Strong Anti-interference Capability
More scenario applications
Vacuum Ion Plating
Vacuum Evaporation Coating
Vacuum Magnetron Sputtering
Plasma Enhanced Chemical Vapor Deposition (PECVD)
Metal Organic Chemical Vapor Deposition (MOCVD)
Atomic Layer Deposition (ALD)
Product Recommendation
Service Advantages
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Principle Advantage
Leading laminar flow principle, high product accuracy, stability, and fast response speed
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Technical Advantage
14 years of technological accumulation, completely independently developed core components, strong customization, and wide adaptability
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Application Advantage
Industry leading customers have long-term batch use and rich experience in various application scenarios
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Service Advantage
1 hour timely response, 24-hour solution presentation, short delivery time, strong service flexibility