-
Flow range
0.5SCCM~20SLPM -
Accuracy
±0.5~1.0%S.P. -
Pressure
5kPaA-2MPaA -
Gas temperature
-50 ℃~80 ℃
Specifications
| Model | TC100 | TC300 | TC450 | ||
| Flow range | 20SCCM～20SLPM | 0.5SCCM～20SLPM | 2SCCM～20SLPM | ||
Accuracy | ±1.0%F.S. (2%～100% F.S.) | ±1.0%S.P.(20%～100%F.S.) | ±0.5%S.P.(20%～100%F.S.) | ||
| Repeatability | ±0.2%F.S. | ±0.2%S.P.(20%～100%F.S.) | ±0.1%S.P.(20%～100%F.S.) ±0.02%F.S.(0.5%～20%F.S.) | ||
Pressure shift | ≤±0.1%F.S./100kPa（Benchmark 100kPaA) | ≤±0.1%S.P./100kPa（Benchmark 100kPaA) | |||
Temperature shift | ≤±0.05%F.S./℃（Benchmark 25℃） | ≤±0.02%F.S./℃（Benchmark 25℃） | |||
| Zero shift | ±0.2%F.S. | ±0.1%F.S. | |||
| Operating range | 2%～100%F.S. | 1%～100%F.S. | 0.5%～100%F.S. | ||
| Response time | ≤800ms | ≤600ms | |||
| Warm-up time | ≤1s | ||||
| Gas temperature | 0℃～50℃ | -20℃～60℃ | |||
| Valve function | Normally closed | ||||
| Proof pressure | 1.5 MPaA | ||||
| Max pressure | 900kPaA | ||||
| Leak rate | ≤1×10-10 Pa·m³/s He | ||||
| Power supply voltage | 24VDC(±20%) | ||||
| Current consumption | <150mA（＜3.6W） | ||||
| Mounting orientation sensitivity | None | ||||
| Process connectors | G thread、VCR、Swagelok、IGS | ||||
| Wetted materials | SUS316L、FKM、FFKM、EPDM、Neoprene | ||||
| Sealing | Rubber ring seal：FKM、FFKM、EPDM、Neoprene | ||||
| Communication | RS485、4～20mA / 0～5V | ||||
Application scenarios
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