Practical knowledge

Gas microflow measurement and control has always been one of the important core technologies in high-end manufacturing, and the core sensors and control components in this core technology field are the gas mass flow meters and gas mass flow controllers that we will focus on discussing today.

Of course, as the name suggests, it is used to measure and control gas flow. The gas here does not refer to natural gas at home, or gas used in traditional energy and chemical enterprises, power plants, etc. In these scenarios, the measured and controlled gas flow rate and corresponding pipe diameter are generally relatively large, with gas flow rates mostly above 15m ³/hour, and corresponding pipe diameters ranging from 15mm to 3000mm (or even larger).

The gas mass flow meter and gas mass flow controller we are discussing here refer to sensors and devices suitable for measuring and controlling small and micro flow rates (from 0.000001m ³/hour to 300m ³/hour, corresponding to pipe diameters ranging from 3mm to 65mm). They require a very small volume (usually the size of a palm) and very precise measurement and control (with repeatability accuracy better than 0.2%, and need to withstand the effects of environmental temperature, pressure, and different gas working media). Currently, there are mainly two types of products that meet the above requirements: gas mass flow meters and gas mass flow controllers,

They are: 1. Gas mass flow meter and gas mass flow controller based on laminar flow principle

2. Gas mass flow meter and gas mass flow controller based on thermal principle.