Practical knowledge

Gas mass flow meter (MFM) and mass flow controller (MFC) refer to sensors and automation equipment mainly used for measuring and controlling small and micro flow rates (from 0.000001m ³/hour to 300m ³/hour, corresponding to pipe diameters ranging from 3mm to 65mm) of gas.

According to the principle, there are two types of gas mass flow meters and controllers: laminar differential pressure principle and thermal principle.

Schematic diagram of laminar differential pressure

        YIDU has independently developed and designed gas mass flow meters and mass flow controllers based on the principle of laminar differential pressure. By detecting gas differential pressure, pressure, and temperature, gas flow can be measured and controlled. The minimum range for standard models of YIDU gas mass flow meters and mass flow controllers is 0.5SCCM (smaller ranges can be customized). 0.5SCCM is 0.5ml/min (milliliters per minute) under standard conditions, which is 500uL/min (microliters per minute). Calculated based on a normal range ratio of 100:1, the actual measurement and control range is 5uL/min~500uL/min.

What is the concept of a minimum measurement and control flow rate of 5uL/min?

For example, a 550mL mineral water bottle takes 110000 minutes, 1833 hours, and 76 days to fill the bottle with gas to reach the standard temperature and pressure environment.