Basic knowledge

2025-11

05

What are the commonly used terms for mass flow meters/mass flow controllers, and what do they represent?

Volume flow rate: also known as operating flow rate, which refers to the volume of fluid flowing through the cross-section of a pipeline at real-time temperature and pressure per unit time. The representative units for small flow rates are generally ml/min and L/min.


Standard flow rate: The volumetric flow rate obtained through temperature and pressure compensation. General definition of standard conditions: (1) Pressure: 1 atmosphere (101.325KPa) (2) Temperature: 0 ℃/15 ℃/20 ℃/25 ℃, specific temperature definitions can be provided

Choose by yourself. The default setting for the YIDU flow controller is 25 ℃, 101.325KPa, and the units are generally SCCM and SLPM.


Mass flow rate: the mass of fluid flowing through the cross-section of a pipeline per unit time. The YIDU mass flow controller measures the standard flow rate. When calculating the actual mass of gas, it can be obtained by multiplying the density by the standard flow rate.


Instantaneous flow rate: The amount of fluid flowing through a certain cross-section when the time is very short is called instantaneous flow rate.


Cumulative flow rate: The cumulative value of the instantaneous flow rate of gas passing through a certain section over a certain period of time.


Set flow rate: a specialized term for mass flow controllers, MFC stabilizes fluid flow at a fixed flow rate value by controlling the opening of the proportional control valve. The set flow rate is generally the standard flow rate.


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