-
Pressure range
2kPaA-2MPaA -
Accuracy
±0.15%~0.3%F.S. -
Direction optional
Can control upstream or downstream pressure -
Multifunction
Control pressure while outputting flow rate
Specifications
| Model | SPC100 | SPC200 |
| Pressure range | 2kPaA~2MPaA | 2kPaA~2MPaA |
Accuracy | ±0.3%F.S. | ±0.15%F.S. |
| Repeatability | ±0.2%F.S. | |
Pressure shift | Zero：≤±0.2%F.S./100KPa； Span：≤±0.2%F.S./100Kpa(reference pressure100KPaA) | Zero：≤±0.05%F.S./100KPa； Span：≤±0.05%F.S./100Kpa(reference pressure100KPaA) |
Temperature shift | Zero：≤±0.05%F.S./℃； Span：≤±0.05%F.S./℃（reference temperature25℃） | Zero：≤±0.02%F.S./℃； Span：≤±0.02%F.S./℃（reference temperature25℃） |
| Operating range | 1%～100%F.S. | |
| Valve function | Normally closed | |
| Control type | Control upstream or downstream pressure | |
| Full range flow | 0.5SCCM~5000SLPM | |
| Warm-up time | ≤1s | |
| Gas temperature | -20℃～60℃ | |
| Proof pressure | 2.5 MPaA | |
| Power supply voltage | 24VDC(±20%) | |
| Mounting orientation sensitivity | None | |
| Process connectors | G thread | |
| Wetted materials | SUS316L | |
| Sealing | Rubber ring seal：FKM | |
| Communication | RS485, 0～5V, 4～20mA | |
Application scenarios
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Pressure control of cooling gas in cooling process
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